E07800 - SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment Revision:SEMI E78-0706 - Superseded and also soluble in ether
$193.00
Description
and also soluble in ether
SEMI E69-0298 (Reapproved 0913)
1-1017 (technical revision)
the customer may want to reference SEMI M1
E07800 - SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment Revision:SEMI E78-0706 - Superseded and also soluble in etherThe purpose of this Guide is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment. It is a guide for establishing electrostatic compatibility of equipment used in semiconductor manufacturing. Electrostatic compatibility in the entire semiconductor factory is addressed in SEMI E129. Electrostatic surface charge causes a number of undesirable effects in semiconductor
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